Microstructure and Preferred Orientation of Titanium Nitride Films Prepared by Laser CVD

Cubic aluminum nitride and gallium nitride thin films prepared by pulsed laser deposition

Ž . Ž . The growth of cubic aluminum nitride AlN and cubic gallium nitride GaN is studied. The effects of ambient pressure and substrate temperature on the structure of the AlN and GaN films are systematically investigated. It is shown that the films are amorphous when the temperature and the pressure are too low. Cubic AlN is obtained at a temperature of 8008C and a pressure of 0.2 Torr. Cubic...

Microstructure and magnetic properties of oxidized titanium nitride thin films in situ grown by pulsed laser deposition

Different oxidation states of titanium nitride thin films, including pure TiN(h 0 0), TiN1−xOx(h 0 0), Ti2O3(0 0 l) and pure anatase TiO2(0 0 l), were prepared by pulsed laser deposition with various oxygen pressures (PO2) using a TiN target. Elaborative evolutions of the crystal and electronic structures of the obtained films were examined systematically by x-ray diffraction and x-ray absorpti...

Structure and mechanical properties of titanium nitride thin films grown by reac - tive pulsed laser deposition

Carbon Nitride and Carbon Fluoride Thin Films Prepared by HiPIMS

I Abstract The present thesis focuses on carbon-based thin films prepared by high power impulse magnetron sputtering (HiPIMS) and direct current magnetron sputtering (DCMS). Carbon nitride (CN x : 0 < x < 0.20) as well as carbon fluoride (CF x : 0.04 < x < 0.35) thin films were synthesized in an industrial deposition chamber by reactive magnetron sputtering of graphite in Ne/N 2 , Ar/N 2 , Kr/N...

Thickness Influence on In Vitro Biocompatibility of Titanium Nitride Thin Films Synthesized by Pulsed Laser Deposition

We report a study on the biocompatibility vs. thickness in the case of titanium nitride (TiN) films synthesized on 410 medical grade stainless steel substrates by pulsed laser deposition. The films were grown in a nitrogen atmosphere, and their in vitro cytotoxicity was assessed according to ISO 10993-5 [1]. Extensive physical-chemical analyses have been carried out on the deposited structures ...